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[Analysis Case] Evaluation of Element Distribution in Textured GaN-based LEDs

Even with a structure that has uneven surfaces, depth distribution evaluation is possible through flattening processing.

GaN-based LEDs have become widely used for lighting applications. To enhance the light extraction efficiency, textured surfaces may be created; however, these textures can lead to a degradation in depth resolution during depth analysis. We will present cases where flattening processing was applied to textured surfaces to mitigate the degradation of depth resolution and evaluate the depth concentration distribution, as well as cases where analysis was conducted from the backside (substrate side).

• Company：一般財団法人材料科学技術振興財団　MST
• Price：Other

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